Front and rear running fully enclosed protective sealed space, with one chemical tank paired with one QDR water tank as one process module. According to process requirements or clean room space requirements, it can be customized to achieve fully automated operation of multi module functional equipment. After loading, the process formula is selected, and the equipment runs automatically. After completion, an alarm prompt is given, and personnel take away the goods

High degree of freedom in process parameter settings, allowing for flexible adjustment of equipment operating parameters based on product models

Temperature control accuracy ± 1 ℃

The fully automatic acid mixing and liquid preparation system can freely adjust the parameter ratio according to the product model,

Customize concentration monitoring and other functions according to customer needs, and automatically replenish fluids based on set values

Automatic fluid replacement system: can replenish fluid according to product batch, fluid change time, etc., with a minimum replenishment accuracy of 0.1ml

Particle control: up to 0.2 μ m ≤ 20 particles