The equipment operates fully automatically. After loading the goods, the process formula is selected and the equipment runs automatically. After completion, an alarm prompt is triggered and personnel take away the goodsHigh degree of freedom in process parameter settings, allowing for flexible adjus

Front and rear running fully enclosed protective sealed space, with one chemical tank paired with one QDR water tank as one process module. According to process requirements or clean room space requirements, it can be customized to achieve fully automated operation of multi module functional equipme

Fully automatic/semi-automatic equipment, configured according to customer needsCleaning wafers using DIW/two fluid/high pressure, etcHigh speed hollow motor ensures smooth operation of the productProducts that meet all sizesSingle cavity, dual cavity, and more cavity configurations can be freely ad

Model: cassette type/cassette lessProduct size: 4-inch to 8-inch wafersThe equipment operates automatically according to the manufacturing processParticle size: cassette type 0.2 μ m ≤ 20 particles; Cassette less 0.16 μ m ≤ 20 pieces

Model: cassette type/cassette lessProduct size: 4-inch to 8-inch wafersThe equipment operates automatically according to the manufacturing processParticle size: cassette type 0.2 μ m ≤ 20 particles; Cassette less 0.16 μ m ≤ 20 pieces

Compatible with OHT and AGV;② 1~4Load ports can be configured according to customer needs;③ Cleanliness level meets ISO Class 1 standard;④ Compact structure and small footprint;⑤ Modular design, low maintenance cost;⑥ Meet SEMI S2 and SEMI S8 standards;⑦ Compatible with 8-inch and 12 inch wafe